Web10 Nov 2024 · cleaning methods such as ultrasonic cleaning (USC), CO2 cleaning, and wet cleaning may not be sufficiently efficient, economical, or environment friendly. In this study, a laser shockwave cleaning (LSC) method with a 233 fs pulsed laser was developed, which is different from the laser ablation cleaning method. Web15 Feb 2024 · Laser shockwave cleaning (LSC) has been gaining increasing attention due to its advantages in decontaminating various micron- and nano-scale contaminated particles on silicon (Si) wafer surfaces. However, the particles in a blind zone right under the laser-induced plasma, the origin of the shockwave, cannot be removed efficiently, thereby …
Elimination of blind zone in nanoparticle removal on silicon wafers …
WebAn apparatus and method for cleaning the surface of a substrate using laser-induced plasma shockwaves and ultraviolet radiation is described. After defects such as organic, inorganic and metallic particles are detected during an inspection step, the substrate is mounted on a motorized stage inside a cleaning chamber. A laser beam is focused into a … WebCLEANING TECHNOLOGY Shockwave definition: A strong pressure wave in any medium, such as air, water or solid substance. Often caused by supersonic aircraft, explosions, … emily hoechst
Elimination of blind zone in nanoparticle removal on silicon wafers …
Web19 Nov 2004 · A shockwave cleaning apparatus cleans one or more surfaces within a vessel A sensor (206, 208) senses one or more thermodynamic properties associated with the vessel (200). A control system (214) is coupled to an initiator and a fuel/oxidizer source to control the firing of the apparatus responsive to input from the sensor (206, 208). WebThe proprietary EPIC™ (Extraction Pressure Impulse Cleaner) cleaning system utilizes shockwave displacement energy generated from the patented IMPULSE® cleaner. The IMPULSE® cleaner safely and effectively concentrate a repeated series of dynamic high-pressure waves directly and deeply into the tube bank. The cleaning is coordinated via a ... Web1 Feb 2024 · Laser shockwave cleaning (LSC) has been gaining increasing attention due to its advantages in decontaminating various micron- and nano-scale contaminated particles on silicon (Si) wafer surfaces. dragalia lost compelling book